Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11841624 | Exposure apparatus and method of manufacturing article | — | 2023-12-12 |
| 11487212 | Exposure apparatus and method of manufacturing article | — | 2022-11-01 |
| 10725388 | Exposure apparatus and method of manufacturing article | Izumi Kawahara | 2020-07-28 |
| 10401745 | Exposure apparatus and article manufacturing method | Hikaru Sugita | 2019-09-03 |
| 8804099 | Magnetic supporting mechanism having a movable magnet with a varying width, exposure apparatus with the magnetic supporting mechanism, and device manufacturing method thereof | — | 2014-08-12 |