Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10539879 | Optical apparatus, exposure apparatus, method of manufacturing optical apparatus, and method of manufacturing article | Takeshi Nakajima, Satoshi Tomura, Mitsuru Seki | 2020-01-21 |
| 8319948 | Evaluation method and exposure apparatus | Shu Watanabe | 2012-11-27 |