Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9559015 | Method of forming a conductive line pattern in FinFET semiconductor devices | — | 2017-01-31 |
| 9502306 | Pattern formation method that includes partially removing line and space pattern | Tadashi Arai | 2016-11-22 |
| 9291903 | Forming method and substrate | — | 2016-03-22 |