Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8926258 | Substrate supporting apparatus and substrate transporting apparatus with coupling magnets | Satoshi Yamada | 2015-01-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8926258 | Substrate supporting apparatus and substrate transporting apparatus with coupling magnets | Satoshi Yamada | 2015-01-06 |