Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12386276 | Detection device, detection method, lithography apparatus, and article manufacturing method | Toshiki Iwai | 2025-08-12 |
| 12092954 | Imprint apparatus, imprint method, and article manufacturing method | — | 2024-09-17 |
| 12092955 | Holding device, method of determining attraction abnormality in holding device, lithography apparatus, and method of manufacturing article | — | 2024-09-17 |