Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9054142 | Data collection system for vacuum processing apparatus | Yugui Zhen, Toshiaki Sumitani, Yoshinori Azuma | 2015-06-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9054142 | Data collection system for vacuum processing apparatus | Yugui Zhen, Toshiaki Sumitani, Yoshinori Azuma | 2015-06-09 |