Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10083830 | Substrate cleaning method for removing oxide film | Takuya Seino, Manabu Ikemoto | 2018-09-25 |
| 9593412 | Deposition apparatus and electronic device manufacturing method | Nobuo Yamaguchi, Shinya Nagasawa | 2017-03-14 |
| 9322092 | Sputtering apparatus and method of manufacturing electronic device | Nobuo Yamaguchi, Shinya Nagasawa | 2016-04-26 |
| 8663437 | Deposition apparatus and electronic device manufacturing method | Nobuo Yamaguchi, Shinya Nagasawa | 2014-03-04 |
| 8524094 | Masking material for dry etching | Isao Nakatani, Naoko Matsui | 2013-09-03 |