Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4837123 | Mask structure for lithography, method of preparation thereof and lithographic method | Hideo Kato, Masaaki Matsushima, Hirofumi Shibata | 1989-06-06 |
| 4804600 | Lithographic mask structure and process for preparing the same | Hideo Kato, Hirofumi Shibatya | 1989-02-14 |
| 4677042 | Mask structure for lithography, method for preparation thereof and lithographic method | Hideo Kato, Masaaki Matsushima, Hirofumi Shibata | 1987-06-30 |