Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12205805 | Sputtering apparatus, film formation method, and method for manufacturing product | — | 2025-01-21 |
| 11414746 | Film forming apparatus and film forming method using the same | Takamasa Horie, Hiroyuki Kobayashi | 2022-08-16 |