Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8154707 | Illumination optical system and exposure apparatus having the same | — | 2012-04-10 |
| 7499145 | Illumination optical system and exposure apparatus having the same | — | 2009-03-03 |
| 7170686 | Illumination optical system, exposure apparatus, and device manufacturing method using the same | — | 2007-01-30 |
| 6765649 | Exposure apparatus and method | — | 2004-07-20 |
| 6650450 | Light transmitting and receiving device having optical member with beam splitter | Shigeru Oshima | 2003-11-18 |
| 5689354 | Optical space communication apparatus | — | 1997-11-18 |
| 5680241 | Optical space communication | Tetsuo Sakanaka | 1997-10-21 |
| 5627669 | Optical transmitter-receiver | Tetsuo Sakanaka, Yasusaburo Degura, Takehide Hamuro | 1997-05-06 |
| 5530577 | Two-way optical communication apparatus | Shigeru Oshima, Tetsuo Sakanaka | 1996-06-25 |
| 5500754 | Optical transmitter-receiver | Mikio Sakai, Tetsuo Sakanaka | 1996-03-19 |
| 5210645 | Light blocking device for optical lenses | Shigeru Oshima | 1993-05-11 |