Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11385714 | Magnetic deformable member | Yasuyoshi Watanabe | 2022-07-12 |
| 11073912 | Magnetic deformable member | — | 2021-07-27 |
| 9946056 | Illumination optical system, exposure apparatus, and method of manufacturing article | — | 2018-04-17 |
| 9733571 | Illumination optical device, exposure apparatus, and method of manufacturing article | — | 2017-08-15 |
| 9557523 | Focusing method, focusing apparatus, exposure method, and device manufacturing method | — | 2017-01-31 |
| 8436980 | Illumination optical apparatus, relay optical system, exposure apparatus, and device manufacturing method | — | 2013-05-07 |
| 8149380 | Exposure apparatus and correction apparatus | — | 2012-04-03 |
| 7489387 | Exposure apparatus and device fabrication method | — | 2009-02-10 |