Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9244364 | Exposure apparatus and device manufacturing method | — | 2016-01-26 |
| 8422623 | Exposure apparatus and device manufacturing method | — | 2013-04-16 |
| 8416389 | Exposure apparatus and method of manufacturing device | — | 2013-04-09 |
| 8300209 | Exposure method, exposure apparatus, and device manufacturing method | — | 2012-10-30 |
| 7483764 | Exposure apparatus and device manufacturing method | — | 2009-01-27 |
| 7257453 | Exposure method and apparatus | — | 2007-08-14 |
| 7233836 | Exposure apparatus and device manufacturing method | — | 2007-06-19 |
| 7127311 | Exposure apparatus and device manufacturing method | — | 2006-10-24 |