Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11450533 | Imprint apparatus, imprint method, and article manufacturing method | — | 2022-09-20 |
| 7311738 | Positioning apparatus | — | 2007-12-25 |
| 6188467 | Method and apparatus for fabricating semiconductor devices | Yasuyoshi Yamatsu | 2001-02-13 |