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Dai Nagatani

Canon: 1 patents #14,899 of 19,416Top 80%
Overall (All Time): #3,044,523 of 4,157,543Top 75%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8988656 Exposure apparatus, calibration method, and method of manufacturing article Tomohiro Harayama, Kouji Yoshida, Yuichi Ozawa 2015-03-24