Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039836 | Semiconductor device | — | 2011-10-18 |
| 8034248 | Dry etching method for oxide semiconductor film | — | 2011-10-11 |
| 7960289 | Etching method, pattern forming process, thin-film transistor fabrication process, and etching solution | — | 2011-06-14 |
| 7959843 | Method of fabricating structure | Yoshitaka Zaitsu, Masao Majima, Hironobu Maeda | 2011-06-14 |
| 7767106 | Method of dry etching oxide semiconductor film | — | 2010-08-03 |