Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7317571 | Catadioptric projection optical system, exposure apparatus having the same, device fabrication method | Takashi Kato, Hirohiko Shinonaga | 2008-01-08 |
| 7283294 | Catadioptric projection optical system, exposure apparatus having the same, device fabrication method | Yuji Katashiba, Hideki Morishima | 2007-10-16 |
| 7268952 | Catadioptric projection system, and exposure apparatus having the same | Takashi Kato | 2007-09-11 |
| 7253971 | Catadioptric projection optical system and exposure apparatus having the same | Takashi Kato | 2007-08-07 |
| 7239453 | Projection optical system and projection exposure apparatus | Hiroyuki Ishii, Takashi Kato | 2007-07-03 |
| 7232233 | Catoptric reduction projection optical system and exposure apparatus using the same | Masayuki Suzuki | 2007-06-19 |
| 7130018 | Catoptric projection optical system, exposure apparatus and device fabrication method | — | 2006-10-31 |
| 7092168 | Projection optical system and projection exposure apparatus | Hiroyuki Ishii, Takashi Kato | 2006-08-15 |
| 7075726 | Projection optical system and projection exposure apparatus | Hiroyuki Ishii, Takashi Kato | 2006-07-11 |
| 7053986 | Projection optical system, exposure apparatus, and device manufacturing method | Takashi Kato | 2006-05-30 |
| 6995918 | Projection optical system and projection exposure apparatus | Hiroyuki Ishii, Takashi Kato | 2006-02-07 |
| 6995833 | Projection optical system, exposure apparatus, and device manufacturing method | Takashi Kato | 2006-02-07 |
| 6947210 | Catoptric projection optical system, exposure apparatus and device fabrication method using same | — | 2005-09-20 |
| 6867922 | Projection optical system and projection exposure apparatus using the same | Hiroyuki Ishii, Takashi Kato | 2005-03-15 |
| 6860610 | Reflection type projection optical system, exposure apparatus and device fabrication method using the same | — | 2005-03-01 |
| 6829099 | Projection optical system and projection exposure apparatus | Takashi Kato, Hiroyuki Ishii | 2004-12-07 |
| 6621555 | Projection optical system and projection exposure apparatus with the same, and device manufacturing method | Hiroyuki Ishii, Takashi Kato | 2003-09-16 |
| 6459534 | Projection optical system and projection exposure apparatus with the same, and device manufacturing method | Takashi Kato, Hiroyuki Ishii | 2002-10-01 |
| 6084721 | Zoom lens | — | 2000-07-04 |
| 5790316 | Zoom lens | Jun Hosoya, Yasuhiro Izumi, Yasuyuki Tomita | 1998-08-04 |
| 5760967 | Zoom lens | Jun Hosoya | 1998-06-02 |
| 5751497 | Zoom lens | Fumiaki Usui, Kunio Takeshi, Jun Hosoya | 1998-05-12 |
| 5583700 | Zoom lens | Fumiaki Usui, Kunio Takeshi, Jun Hosoya | 1996-12-10 |
| 5191475 | Zoom lens | Jun Hosoya, Kiyoshi Fukami | 1993-03-02 |
| 5136431 | Zoom lens of the internal focus type | Kiyoshi Fukami, Jun Hosoya, Shigeru Oshima | 1992-08-04 |