AT

Asano Tosiya

Canon: 3 patents #11,241 of 19,416Top 60%
Overall (All Time): #1,551,577 of 4,157,543Top 40%
3
Patents All Time

Issued Patents All Time

Showing 1–3 of 3 patents

Patent #TitleCo-InventorsDate
8159652 Positioning apparatus, exposure apparatus using thereof and device manufacturing method 2012-04-17
7378764 Positioning apparatus, exposure apparatus using thereof and device manufacturing method 2008-05-27
7345865 Magnetic guiding apparatus 2008-03-18