Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6952055 | Intermediate structures in porous substrates in which electrical and optical microdevices are fabricated and intermediate structures formed by the same | Axel Scherer, Victor Fuenzalida | 2005-10-04 |
| 6613241 | MEMS elements with integrated porous membranes and method of making the same | Axel Scherer, Michael J. Hochberg | 2003-09-02 |
| 6461528 | Method of fabricating lateral nanopores, directed pore growth and pore interconnects and filter devices using the same | Axel Scherer, Thomas Hoffman | 2002-10-08 |
| 6350623 | Method of forming intermediate structures in porous substrates in which electrical and optical microdevices are fabricated and intermediate structures formed by the same | Axel Scherer, V. Fuenzalida | 2002-02-26 |