Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7396478 | Multiple internal seal ring micro-electro-mechanical system vacuum packaging method | Ken J. Hayworth, Karl Y. Yee, Kirill V. Shcheglov, Youngsam Bae, A. Dorian Challoner +1 more | 2008-07-08 |
| 7347095 | Integral resonator gyroscope | Kirill V. Shcheglov, A. Dorian Challoner, Ken J. Hayworth, Karl Y. Yee | 2008-03-25 |
| 7285844 | Multiple internal seal right micro-electro-mechanical system vacuum package | Ken J. Hayworth, Karl Y. Yee, Kirill V. Shcheglov, Youngsam Bae, A. Dorian Challoner +1 more | 2007-10-23 |
| 6944931 | Method of producing an integral resonator sensor and case | Kirill V. Shcheglov, A. Dorian Challoner, Ken J. Hayworth, Karl Y. Yee | 2005-09-20 |
| 6859725 | Low power position locator | A. Dorian Challoner | 2005-02-22 |
| 6777312 | Wafer-level transfer of membranes in semiconductor processing | Eui-Hyeok Yang | 2004-08-17 |
| 6281494 | Miniature micromachined quadrupole mass spectrometer array and method of making the same | Ara Chutjian, Michael H. Hecht, Otto J. Orient, Reid A. Brennen | 2001-08-28 |
| 6188067 | Miniature micromachined quadrupole mass spectrometer array and method of making the same | Ara Chutjian, Michael H. Hecht, Otto J. Orient, Reid A. Brennen | 2001-02-13 |
| 6157029 | Miniature micromachined quadrupole mass spectrometer array and method of making the same | Ara Chutjian, Michael H. Hecht, Otto J. Orient, Reid A. Brennen | 2000-12-05 |