Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11864472 | Methods and systems for atomic layer etching and atomic layer deposition | Harold Frank Greer, Andrew D. Beyer, Matthew D. Shaw | 2024-01-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11864472 | Methods and systems for atomic layer etching and atomic layer deposition | Harold Frank Greer, Andrew D. Beyer, Matthew D. Shaw | 2024-01-02 |