Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7777204 | System and method of electron beam writing | Dmitri Lapanik, Shohei Matsushita, Takashi Mitsuhashi | 2010-08-17 |
| 7747977 | Method and system for stencil design for particle beam writing | Dmitri Lapanik, Shohei Matsushita, Takashi Mitsuhashi | 2010-06-29 |
| 7351954 | Method and apparatus for detecting gas concentration with infrared absorption characteristics | Wei Zhang, Huiling Zhou | 2008-04-01 |