MY

Ming-Chih Yeh

CM Cabot Microelectronics: 2 patents #86 of 207Top 45%
CM Cmc Materials: 1 patents #33 of 67Top 50%
Overall (All Time): #1,336,125 of 4,157,543Top 35%
3
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
12338369 Nitride inhibitors for high selectivity of TiN—SiN CMP applications Chih-Hsien Chien, Yi-Hong Chiu, Hung-Tsung HUANG 2025-06-24
9803109 CMP composition for silicon nitride removal Hung-Tsung HUANG, Chih-Pin Tsai 2017-10-31
9752057 CMP method for suppression of titanium nitride and titanium/titanium nitride removal Hui-Fang Hou, William Ward, Chih-Pin Tsai 2017-09-05