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Kathryn Bergman

CM Cabot Microelectronics: 1 patents #131 of 207Top 65%
Overall (All Time): #2,775,385 of 4,157,543Top 70%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
10562149 Polyurethane CMP pads having a high modulus ratio Lin Fu, Rui Ma, Nathan Speer, Chen-Chih Tsai 2020-02-18