Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4597989 | Method of depositing silicon films with reduced structural defects | Glenn Canfield | 1986-07-01 |
| 4460416 | Method for fabricating in-situ doped polysilicon employing overdamped gradually increasing gas flow rates with constant flow rate ratio | — | 1984-07-17 |