Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6641348 | Docking station for substrate transport containers | Klaus Schultz, Alfred Schulz | 2003-11-04 |
| 6510688 | Safety device for a moving system | Erich Adler, Andreas Berger | 2003-01-28 |
| 5601484 | Device for transporting wafer magazines | Erich Adler | 1997-02-11 |