Issued Patents All Time
Showing 1–25 of 65 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288697 | Core module for semiconductor production facility machinery | Yves Fenner | 2025-04-29 |
| 12148642 | Humidity control in semiconductor systems | — | 2024-11-19 |
| 12087603 | Inspection system | — | 2024-09-10 |
| 11978652 | Automatic handling buffer for bare stocker | — | 2024-05-07 |
| 11872603 | Method for cleaning a synthetic surface | Matthias Fryda, Thorsten Matthee | 2024-01-16 |
| 11587816 | Container storage add-on for bare workpiece stocker | — | 2023-02-21 |
| 11515189 | Automatic handling buffer for bare stocker | — | 2022-11-29 |
| 11443962 | Integrated handling system for semiconductor articles | — | 2022-09-13 |
| 11167322 | Cleaning systems and methods for semiconductor substrate storage articles | — | 2021-11-09 |
| 11171024 | Reticle compartment and diffusor plate | — | 2021-11-09 |
| 11152203 | Semiconductor cleaner systems and methods | — | 2021-10-19 |
| 11107715 | Semiconductor stocker systems and methods | — | 2021-08-31 |
| 11049750 | Container storage add-on for bare workpiece stocker | — | 2021-06-29 |
| 11024526 | Robot with gas flow sensor coupled to robot arm | — | 2021-06-01 |
| 10930536 | Workpiece stocker with circular configuration | — | 2021-02-23 |
| 10892155 | Semiconductor cleaner systems and methods | — | 2021-01-12 |
| 10872796 | Semiconductor stocker systems and methods | — | 2020-12-22 |
| 10770323 | Stackable substrate carriers | — | 2020-09-08 |
| 10741431 | Automatic handling buffer for bare stocker | — | 2020-08-11 |
| 10727098 | Reticle compartment and diffusor plate | — | 2020-07-28 |
| 10672633 | Removable compartments for workpiece stocker | — | 2020-06-02 |
| 10665486 | Substrate carrier having drip edge configurations | — | 2020-05-26 |
| 10643878 | Removable compartments for workpiece stocker | — | 2020-05-05 |
| 10593576 | Inspection system | — | 2020-03-17 |
| 10529609 | Container storage add-on for bare workpiece stocker | — | 2020-01-07 |