Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140865 | Inorganic-infiltrated polymer hybrid thin film resists for advanced lithography | Chang-Yong Nam, Aaron Stein, Ming-Yi Lu, Jiyoung Kim, Nikhil Tiwale +1 more | 2024-11-12 |