Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237193 | Gas-inlet module and gas-inlet nozzle | — | 2025-02-25 |
| 12191179 | Load port and multi-use carrier | — | 2025-01-07 |
| 11803276 | Force sensing architectures | Dhaval Chandrakant Patel, Eugene C. Cheung, Pey-Jiun Ko, Po-Jui Chen, Robert W. Rumford +16 more | 2023-10-31 |