Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11657981 | Method and apparatus for compensating for high Thermal Expansion Coefficient mismatch of a stacked device | Marina Zelner, Edward Horne | 2023-05-23 |
| 11444150 | Method and apparatus for a thin film dielectric stack | Marina Zelner, Edward Horne | 2022-09-13 |
| 11274363 | Method of forming a sputtering target | Marina Zelner | 2022-03-15 |
| 10923286 | Method and apparatus for compensating for high thermal expansion coefficient mismatch of a stacked device | Marina Zelner, Edward Horne | 2021-02-16 |
| 10896950 | Method and apparatus for a thin film dielectric stack | Marina Zelner, Edward Horne | 2021-01-19 |
| 10825612 | Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof | Marina Zelner | 2020-11-03 |
| 10770540 | Small-gap coplanar tunable capacitors and methods for manufacturing thereof | Marina Zelner | 2020-09-08 |
| 10497774 | Small-gap coplanar tunable capacitors and methods for manufacturing thereof | Marina Zelner | 2019-12-03 |
| 10332687 | Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof | Marina Zelner | 2019-06-25 |
| 10297658 | Method and apparatus for a thin film dielectric stack | Marina Zelner, Edward Horne | 2019-05-21 |
| 10115527 | Thin film dielectric stack | Marina Zelner, Susan C. Nagy | 2018-10-30 |
| 9490314 | High-throughput deposition of a voltage-tunable dielectric material | Marina Zelner, Susan C. Nagy, James DiLorenzo | 2016-11-08 |
| 9404175 | Method of forming a target for deposition of doped dielectric films by sputtering | Marina Zelner | 2016-08-02 |
| 9318266 | Electrostrictive resonance suppression for tunable capacitors | Mircea Capanu, Marina Zelner | 2016-04-19 |
| 8883606 | Multi-level thin film capacitor on a ceramic substrate and method of manufacturing the same | Ivoyl Koutsaroff, Mark Vandermeulen, Atin J. Patel | 2014-11-11 |
| 8664704 | Electronic component with reactive barrier and hermetic passivation layer | Marina Zelner, Paul Bun Cheuk Woo, Mircea Capanu, Susan C. Nagy | 2014-03-04 |