Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5870199 | Method and apparatus for highly accurate distance measurement with respect to surfaces | Guido Wurbs | 1999-02-09 |
| 5153677 | Method and apparatus for interferometric detection of surface displacement of solids | Roland Keck | 1992-10-06 |