Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8704445 | Method for improving uniformity of high-frequency plasma discharge by means of frequency modulation | Bo Wang, Lichun Xu, Ming Zhang, Ruzhi Wang, Xuemei Song +4 more | 2014-04-22 |