Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10496110 | Apparatus, system and method of mass flow controlling for use in integrated gas delivery system | Changhua Mou, YU-CHIAO YANG, Rui Wang | 2019-12-03 |
| 9989974 | Method and apparatus of mass flow controlling for use in integrated gas delivery system | Changhua Mou, Maolin Wang, Qianyi SU, Di Zhao | 2018-06-05 |
| 7117104 | Ultrasonic liquid flow controller | Aaron S. Tint, Hao Duan, Eric J. Redemann, Christopher Wacinski | 2006-10-03 |
| 6539792 | Method and apparatus for balancing resistance | John Lull | 2003-04-01 |
| 5730181 | Mass flow controller with vertical purifier | Michael Doyle, Kim Ngoc Vu | 1998-03-24 |