Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985045 | Electrostatic chuck mechanism and semiconductor processing device having the same | Haiying Liu | 2021-04-20 |
| 10170285 | Method of operating semiconductor manufacturing apparatus and semiconductor devices | Jinrong Zhao, Shaohua Liu, Gang Wei, Meng Yang, Yali Fu | 2019-01-01 |
| 9899194 | Apparatus for plasma treatment and method of operating the apparatus | Jinrong Zhao, Shaohua Liu, Gang Wei, Meng Yang, Yali Fu | 2018-02-20 |