SL

Shikai LI

BC Beijing Naura Microelectronics Equipment Co.: 1 patents #72 of 168Top 45%
Overall (All Time): #2,453,662 of 4,157,543Top 60%
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Patent #TitleCo-InventorsDate
12404603 Gas inlet assembly of process chamber, gas inlet device, and semiconductor processing apparatus — 2025-09-02