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Kaiyue Cao

BC Beijing Naura Microelectronics Equipment Co.: 1 patents #72 of 168Top 45%
Overall (All Time): #2,418,716 of 4,157,543Top 60%
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Patent #TitleCo-InventorsDate
12314066 Water replenishment control method for semiconductor process device and semiconductor process device Fei Gao, Yang Wang, Fan Li, Hao Yang, Zhe Yang +2 more 2025-05-27