Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12100601 | Etching method with metal hard mask | Yu Zhang, Zhaocheng Liu | 2024-09-24 |
| 8709952 | Etching method, etching apparatus, and computer-readable recording medium | — | 2014-04-29 |