Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10211080 | Robot arms and method for aligning substrate with the same | Xin Chen, Chao Gao, Jianghua Qi, Yujiang Cheng | 2019-02-19 |
| 9890998 | Substrate heating apparatus | Yu Jiao, Yanming Wang, Jie Liu | 2018-02-13 |