Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383136 | Substrate dry device and method for drying substrate based on substrate dry device | Xiaoxiang Zhang, Zongjie Guo, Zheng Liu, Shoukun Wang | 2016-07-05 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383136 | Substrate dry device and method for drying substrate based on substrate dry device | Xiaoxiang Zhang, Zongjie Guo, Zheng Liu, Shoukun Wang | 2016-07-05 |