Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8476368 | Low-k dielectrics obtainable by twin polymerization | Arno Lange, Hans-Joachim Haehnle | 2013-07-02 |
| 7879395 | Method of preparing a coating solution and a corresponding use of the coating solution for coating a substrate | Stephan Wege, Tobias Mayer-Uhma, Cornelia Klein, Alexander Michaelis, Falko Schlenkrich | 2011-02-01 |
| 7265023 | Fabrication method for a semiconductor structure | Moritz Haupt, Hans-Peter Sperlich, Momtchill Stavrev, Stephan Wege | 2007-09-04 |