Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5580384 | Method and apparatus for chemical coating on opposite surfaces of workpieces | Heinrich Zimmermann | 1996-12-03 |
| 5325812 | Substrate holding and rotating arrangement for vacuum processes | Friedrich Stingl | 1994-07-05 |
| 5227202 | Method for chemical coating on opposite surfaces of workpieces | Heinrich Zimmermann | 1993-07-13 |