Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5490915 | Target for cathode sputtering apparatus | — | 1996-02-13 |
| 4747927 | Target plate for cathode disintegration | Eduard Rille, Robert Polacek | 1988-05-31 |
| 4643128 | Multiple holder for substrates to be treated | Karl Baumann, Hermann Staub | 1987-02-17 |
| 4182265 | Wafer support | — | 1980-01-08 |