Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11512171 | Low dielectric constant siliceous film manufacturing composition and methods for producing cured film and electronic device using the same | Kensuke AIDA, Kazuya Arima | 2022-11-29 |
| 9793109 | Perhydropolysilazane, composition containing same, and method for forming silica film using same | Toshiya OKAMURA, Takashi Kanda, Bertram Barnickel, Hiroyuki Aoki | 2017-10-17 |
| 8828877 | Etching solution and trench isolation structure-formation process employing the same | — | 2014-09-09 |