SG

Scott E Galica

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
📍 Belmont, MA: #816 of 1,163 inventorsTop 75%
🗺 Massachusetts: #56,664 of 88,656 inventorsTop 65%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11887808 Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity Atul Gupta 2024-01-30