PS

Palanikumara Sakthivel

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
📍 Gaithersburg, MD: #769 of 1,746 inventorsTop 45%
🗺 Maryland: #13,387 of 35,612 inventorsTop 40%
Overall (All Time): #2,085,985 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
8119413 Method and system for detection of solid materials in a plasma using an electromagnetic circuit Richard E. Pingree, Jr., Mahesh Vanodia, Michael B. Colson 2012-02-21
7794663 Method and system for detection of solid materials in a plasma using an electromagnetic circuit Richard E. Pingree, Jr., Muhesh Vanodia, Michael B. Colson 2010-09-14