MD

Mihaly Deak

AT Axcelis Technologies: 1 patents #165 of 300Top 60%
📍 Leander, TX: #327 of 487 inventorsTop 70%
🗺 Texas: #73,555 of 125,132 inventorsTop 60%
Overall (All Time): #3,413,932 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
7030395 Workpiece support structure for an ion beam implanter featuring spherical sliding seal vacuum feedthrough — 2006-04-18