Alfred M. Halling

AT Axcelis Technologies: 2 patents #105 of 300Top 35%

📍 Danvers, MA: #173 of 334 inventorsTop 55%

🗺 Massachusetts: #42,150 of 88,656 inventorsTop 50%

Overall (All Time): #2,119,934 of 4,157,543Top 55%

Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
7692164	Dose uniformity correction technique	—	2010-04-06
6657209	Method and system for determining pressure compensation factors in an ion implanter	—	2003-12-02