Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604421 | Overlay mark, overlay measurement method and semiconductor device manufacturing method using the overlay mark | Sung-Hoon Hong, Hyun Jin Chang, Hyun Chui Lee | 2023-03-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11604421 | Overlay mark, overlay measurement method and semiconductor device manufacturing method using the overlay mark | Sung-Hoon Hong, Hyun Jin Chang, Hyun Chui Lee | 2023-03-14 |