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Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith |
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Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith |
Yuval Cohen, Shay Kaplan, Daniel Lewin, Meir Ben Simon |
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2017-05-16 |
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Apparatus and methods for individual addressing and noise reduction in actuator arrays |
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Electrostatic parallel plate actuators whose moving elements are driven only by electrostatic force and methods useful in conjunction therewith |
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2016-07-12 |