Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7043991 | Damper for a gauge sensor in a dry etch chamber | Shun-Huang Peng, Shih-Shiung Yang, Ming-Yi Huang | 2006-05-16 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7043991 | Damper for a gauge sensor in a dry etch chamber | Shun-Huang Peng, Shih-Shiung Yang, Ming-Yi Huang | 2006-05-16 |