Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10260863 | Interferometric displacement sensor for integration into machine tools and semiconductor lithography systems | Martin Zech | 2019-04-16 |
| 9829306 | Absolute distance laser interferometer | Khaled Karrai, Pierre-Francois Braun | 2017-11-28 |